전공선택 Plasma Processing

  • 과목코드
    EECE654
  • 강의 - 실습 - 학점
    3-0-3
  • 과목구분
    전공선택

The principles and the applications of plasma etching and deposition technology used in integrated circuits and display manufacturing will be the main subject to be covered. The plasma basics and up-to-dated plasma processing and display equipments will be included.